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Wet Station

Wet Station

사양

  • Configuration : Acid, Organic Bath
  • Spin Coater : Single Processing Wafer
  • Spin Dryer : Single Processing Wafer
  • Frame : Ivory PVC
  • Drain : Buffer Tank
  • Accessory : DI Gun, N2 Gun, Yellow Pump
  • Controller : PLC or Micom

선택 사양
ITEM DESCRIPTION
Spin Coater Scan Arm, Multiple Nozzle, Etc
Accurate Flow Control Dispense Pump 적용 가능
Controller PLC or PC available