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Aligner

Wafer Pre Aligner(ACE-XV Series)

Key Features

  • Fast alignment
  • High performance accuracy
  • High performance repeatability
  • Easy to use and install

Model

  • ACE-XV-300N, ACE-XV-300NS
  • ACE-XV-200N, ACE-XV-200NS
  • ACE-XV-150N

Option

  • Sapphire Command select

ITEM SPECIFICATION
Wafer type Ø300, Ø200, Ø150, Ø100, Si, Notch,Flat, (Option : Sapphire)
Θ rotation 0.0072 º
Axis ϴ , X, Y
Stage repeatability ± ＜ 3um
Notch alignment accuracy ± ＜ 0.1 º
Centering accuracy ± ＜ 30um
Positioning time ＜ 3.5 sec
Interface RS-232, Digital I/O
Utility Vacuum
Power +24VDC / 5A
Wafer Pre Aligner(ACE-PL Series)

Key Features

  • High performance and repeatability
  • Soft touch pad
  • Edge contact
  • No back side contamination
  • Easy to use and install

Model

  • ACE-PL-200N
  • ACE-PL-300N

ITEM SPECIFICATION
Wafer type Ø300, Ø200, Ø150, Ø100, Si – Notch Wafer
Θ rotation 0.0072 º
Axis ϴ , Z
Notch alignment accuracy ± ＜ 0.1 º
Centering accuracy ± ＜ 30um
Positioning time ＜ 0.7 sec
Lift time ＜ 0.5 sec down,＜ 1.0 sec up
Interface RS-232, Digital I/O
Utility Air
Power +24VDC / 5A
Wafer Pre Aligner(ACE-VP Series - Vacuum Aligner)

Key Features

  • High performance and repeatability
  • Use vacuum chamber
  • Easy to use and install

Model

  • ACE-VP-300A. ACE-VP-300B
  • ACE-VP-200A. ACE-VP-200B
  • ACE-VP-150A. ACE-VP-150B

Option

  • Sapphire Command select

ITEM SPECIFICATION
Wafer type Ø300, Ø200, Ø150, Si, Glass, Sapphire Select
Θ rotation 0.0072 º
Axis ϴ
Notch alignment accuracy ± ＜ 0.1 º
Centering accuracy ± ＜ 50um
Positioning time ＜ 0.6 sec
Interface RS-232, Digital I/O
Utility unnecessary
Dimension (Controller) 150(W) * 65(L) * 180(H)
Power +24VDC / 5A
Wafer Pre Aligner(ACE-S Series)

Key Features

  • Include OCR
  • Wafer all size alignment
  • Special Type
  • Include OCR

Model

  • ACE-XV-300N-15R
  • ACE-XV-300N-15L
  • ACE-XV-200N-15F

Option

  • Wafer edge burr, chipping
  • Sapphire Command select

ITEM SPECIFICATION
Wafer type Ø300 Notch, Ø200 Notch Flat,
Θ rotation 0.0072 º
Axis ϴ , X, Y
Stage repeatability ± ＜ 3um
Notch alignment accuracy ± ＜ 0.1 º
Positioning time ＜ 3.5 sec
Interface RS-232, Digital I/O
Utility Vacuum
Power +24VDC / 5A
Wafer Pre Aligner(ACE-G Series)

Key Features

  • High performance repeatability
  • Easy to use and install
  • Wafer edge contact
  • Grip alignment

Model

  • ACE-XG-300N
  • ACE-XG-200N

ITEM SPECIFICATION
Wafer type Ø300, Ø200, Si-Wafer Notch type
Θ rotation 0.0072 º
Notch alignment accuracy ± ＜ 0.1 º
Centering accuracy ± ＜ 50um
Positioning time ＜ 3.5 sec
Interface RS-232, Digital I/O
Utility Air
Power +24VDC / 5A
Wafer Pre Aligner(ACE-R Series)

Key Features

  • Thin Wafer alignment
  • Ring wafer alignment
  • High performance repeatability
  • Easy to use and install

Model

  • ACE-XR-200L
  • ACE-XR-300L
  • ACE-XRF-300L
  • ACE-XRW-300L

Option

  • Sapphire Command select
  • Ring Flat, Flat Wafer, Warpage

ITEM SPECIFICATION
Θ rotation 0.0072 º
Axis Θ
Notch alignment accuracy ± ＜ 0.1 º
Centering accuracy ± ＜ 50um
Positioning time ＜ 3.5 sec ~ 5.5sec
Interface RS-232, Digital I/O
Utility Vacuum. Air
Power +24VDC / 5A
Wafer Pre Aligner(ACE-W Series)

Key Features

  • Wafer alignment
  • WEE function
  • High performance repeatability
  • Easy to use and install

Model

  • ACE-W-300N
  • ACE-W-200N
  • ACE-W-320N

ITEM SPECIFICATION
Wafer Type Ø300, Ø200, SI- Wafer
Function Wafer alignment and edge exposure
Notch alignment accuracy ± ＜ 0.1 º
Centering accuracy ± ＜ 30um
Exposure Width 0.1mm ~ 8.0mm
Interface RS-232, Digital I/O
Utility Vacuum. Air
Power +24VDC / 5A
Wafer Pre Aligner(ACE-W Series)

Key Features

  • Wafer alignment
  • Warpage, Bonding wafer align
  • Special Ceramic wafer
  • High performance repeatability
  • Easy to use and install

Model

  • ACE-XW300N
  • ACE-XWF300N

Option

  • Sapphire Command select

ITEM SPECIFICATION
Wafer Type Si-Notch, 296mm Si-Flat , Warpage , Glass, Sapphire
Θ rotation 0.0072 º
Notch alignment accuracy ± ＜ 0.1 º
Centering accuracy ± ＜ 50um
Positioning time ± ＜ 4.5 sec
Interface RS-232, Digital I/O
Utility None
Power +24VDC / 5A
MASK Aligner(ACE-MASK150Q)

Key Features

  • Fast alignment
  • High performance accuracy
  • High performance repeatability
  • Easy to use and install

Model

  • ACE-MASK150Q,

ITEM SPECIFICATION
Wafer Type 150mm * 150mm Square Glass Mask
Θ rotation 0.0036 º
Axis Center, Theta, Rotation
Wafer detect Glass sensor
Notch alignment accuracy ± ＜ 0.05 º
Centering accuracy ± ＜ 30um
Positioning time 0°＜ 3.0sec , 90°＜ 4.0sec, 180°＜ 5.0sec, 270°＜ 5.0sec
Chuck ORG time 0°=0sec , 90°＜ 1.5sec, 180°＜ 2.0sec, 270°＜ 2.5sec
Interface RS-232, Digital I/O
Utility Vacuum, Air (DRY 5.0kg)
Weight 6Kg
Power +24VDC / 5A
Wafer Pre Aligner(ACE-DXV Series)

Key Features

  • Fast alignment
  • High performance accuracy
  • High performance repeatability
  • Easy to use and install

Model

  • ACE-DXV320N-(A)(R)(L)
  • ACE-DXV215N–(A)(R)(L)
  • ACE-DXV200L
  • ACE-XV300L
  • ACE-XV200L

Option

  • Sapphire Command select , OCR Type

ITEM SPECIFICATION
Wafer Type Ø300~ Ø200 , Ø200~ Ø150, Ø150~ Ø100, Notch, Flat, Si,Glass, Sapphire
Θ rotation 0.0072 º
Axis ϴ , X, Y
Chuck size Ø50
Stage repeatability ± ＜ 3um
Notch alignment accuracy ± ＜ 0.1 º
Centering accuracy ± ＜ 30um
Positioning time ＜ 3.5 sec, ＜ 4.5 sec
Interface RS-232, Digital I/O
Utility Vacuum
Power +24VDC / 5A
Wafer Pre Aligner(ACE-QXV34-215L)

Key Features

  • Fast alignment
  • High performance accuracy
  • High performance repeatability
  • Easy to use and install

Model

  • ACE-QXV34-3215N-(A)(R)(L)

ITEM SPECIFICATION
Wafer Type Ø340~ Ø300~ Ø200~Ø150 Notch, Flat, Si Wafer
Θ rotation 0.0072 º
Axis ϴ , X, Y
Chuck size Ø50
Stage repeatability ± ＜ 3um
Notch alignment accuracy ± ＜ 0.1 º
Centering accuracy ± ＜ 30um
Positioning time ＜ 3.5 sec(340mm), ＜ 4.5 sec(300mm) , ＜ 4.8sec(200mm), ＜ 5.1sec(150mm)
Interface RS-232, Digital I/O
Lifter UP / DN UP time 1.0sec DN time 1.0sec
Utility Vacuum
Power +24VDC / 5A
FLIP Aligner(ACE-FLIP-150Q)

Key Features

  • Fast alignment
  • High performance accuracy
  • High performance repeatability
  • Easy to use and install

Model

  • ACE-FLIP-150Q

ITEM SPECIFICATION
Wafer Type 150mm * 150mm Square Glass Mask
Θ rotation 0.0036 º
Axis Flip
Wafer detect Glass sensor
Flip accuracy ± ＜ 0.05 º
Positioning time(Flip) ＜ 3.0sec
Chuck ORG time ＜ 1.5sec
Interface RS-232, Digital I/O
Utility Air (DRY 5.0kg)
Weight 5Kg
Power +24VDC / 3A
BATCH Aligner(ACE-BATCH-200F)

Key Features

  • Fast alignment
  • High performance accuracy
  • High performance repeatability
  • Easy to use and install

Model

  • ACE-BATCH-200F

Option

  • Sapphire Command select

ITEM SPECIFICATION
Wafer Type Ø200mm Si-Flat
Θ rotation 0.0032 º
Axis Roller, Guide
Operation mode 2 Type operation
alignment accuracy ± ＜ 0.1 º
Positioning time(Flip) SORT°＜ 5.0sec, BOT°＜ 7.0sec, TOP°＜ 13.0sec
Interface RS-232, Digital I/O
Weight 5kg
Power +24VDC / 3A
DESK COATER(GMS Series)

Key Features

  • Desk Coater
  • Full Color Touch screen
  • 20Step 20Recipe
  • Easy to use and install
  • Center jig

Model

  • ACE-GMS-100
  • ACE-GMS-200
  • ACE-GMS-300
  • ACE-GMS-300-10000R
  • ACE-GMS-250SQ

Option

  • Special

ITEM SPECIFICATION
Model (Wafer) GMS-100(2~6”), GMS-200(2~8”), GMS-300(2~12”)
GMS-SQ(250 * 250* * 8 Square Mask Wafer),
Motor AC Servo
Spin RPM 3000RPM (MAX 5000RPM)
Dispense Manual Dispense
CUP SUS
Chuck Vacuum Type
Control Touch Color Screen
Recipe 20Step 20Recipe, Fill color Touch screen
Weight 5kg, 60kg, 70kg,
Power AC 100~220V 1Ø
DESK BAKE UNIT

Key Features

  • Desk Type

Model

  • ACE-HOT-100,200,300

Option

  • Special

ITEM SPECIFICATION
Model (Wafer) 4”, 6, ”, 8”, 12”
ACE-HOT-100,200,300
Max Working Temp 200ºC
Operating Temp 50ºC ~ 150ºC
Timer 1~9999 sec
Temp Uniformity 1ºC at 150ºC
Electric wattage 1kW
Control PID Control
Chamber exhaust Exhaust line 3/8”
Dry Air 3~5kg
Power AC 100~220V 1Ø
SPIN DEV BAKE UNIT

Key Features

  • Manual Type

Model

  • ACE-SDB-100,200,300

Option

  • Special

ITEM SPECIFICATION
Model (Wafer) 4”, 6, ”, 8”, 12”
COATER + DEVELOPER + HP
Max Working Temp 200ºC
Operating Temp 50ºC ~ 150ºC
Timer 1~9999 sec
Temp Uniformity 1ºC at 150ºC
Loading Manual
Control PID Control, Pin UP/DN
Spin RPM 3000RPM (MAX 5000RPM)
Dry Air 3~5kg
Power AC 100~220V 1Ø